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This is a device for heating φ300mm bonded wafers using an IR lamp.
- Manual/automatic switching and arbitrary temperature adjustment are possible. - The heating temperature can rise up to a maximum of 500℃.
High-speed heating process for metals, wafers, etc.!
The RP-420 model high-speed lamp heating device is a high-speed lamp heating device that supports a maximum temperature of 700°C. It is a compact batch furnace type, making it ideal for small quantities and research and development. It uses halogen lamp heaters as the heating source, suitable for high-speed, high-temperature processing of metal plates and similar materials. The work chamber features a pull-out plate design, allowing for easy supply and discharge of workpieces. Additionally, the operation panel is user-friendly, utilizing a touch panel for excellent operability. There are two types of exhaust: water-cooled and air-cooled. It can also operate in locations without cooling water. For more details, please download the catalog or contact us.
The semiconductor manufacturing process is gaining attention for RTP as an important heating technology due to advancements in high density and miniaturization.
The MILA-5000 series features high-speed heating and cooling, as well as clean heating, characteristic of infrared gold image furnaces. It is a compact and low-cost infrared lamp heating device that allows heating under flexible atmospheres, integrating a temperature controller and an atmosphere-variable chamber. Heating operations can be performed via USB connection on a computer, making data management easy.
A compact tabletop lamp heating device that integrates a heating furnace, chamber, and temperature controller, capable of heat treatment for samples up to 50mm square!
This device is a tabletop lamp heating system that enables heat treatment of samples up to 50mm square. Since the launch of the MILA-5000 series, which is a heating device for samples up to 20mm square, it has been well-received by many customers. In response to requests from customers who wanted to perform heat treatment on slightly larger samples, we have maintained the compact body that integrates the heating furnace, chamber, and temperature controller, while enabling heat treatment of samples up to 50mm square.
