Tabletop Lamp Heating Device MILA-5000Z Series
The semiconductor manufacturing process is gaining attention for RTP as an important heating technology due to advancements in high density and miniaturization.
The MILA-5000 series features high-speed heating and cooling, as well as clean heating, characteristic of infrared gold image furnaces. It is a compact and low-cost infrared lamp heating device that allows heating under flexible atmospheres, integrating a temperature controller and an atmosphere-variable chamber. Heating operations can be performed via USB connection on a computer, making data management easy.
- 企業：アドバンス理工（旧：アルバック理工） 本社
- 価格：Other
